Semiconductor light-emitting device and method of forming the same

ABSTRACT

A semiconductor light-emitting device has a first principal surface, a second principal surface formed on a side opposite to the first principal surface, and a light-emitting layer. A p-electrode on the second principal surface is in the region of the light-emitting layer and surrounds an n-electrode. An insulating layer on the side of the semiconductor layer surrounds the p- and the n-electrodes. A p-metal pillar creates an electrical connection for the p-electrode, and an n-metal pillar creates an electrical connection for the n-electrode. A resin layer surrounds the end. portions of the p- and the n-metal pillars, and also covers the side surface of the semiconductor layer, the second principal surface, the p-electrode, the n-electrode, the insulating layer, the p-metal pillar and the n-metal pillar.

CROSS-REFERENCE TO RELATED APPLICATION

This application is based upon and claims the benefit of priority fromJapanese Patent Application No. 2011-268321, filed Dec. 7, 2011, andJapanese Patent Application No. 2012-218783, filed Sep. 28, 2012; theentire contents of both applications are incorporated herein byreference.

FIELD

Embodiments described herein relate to a semiconductor light-emittingdevice.

BACKGROUND

It is well known that there is a structure in which a p-electrode and ann-electrode are on one principal side of a semiconductor layercontaining a light-emitting layer. In this structure, the electrodes donot impede output from the light-emitting surface, allowing for variableelectrode shapes and layouts However, there will be a more preferred,optimal design for them because the electrode shape and layout affectthe electrical characteristics and the light-emitting efficiency.

DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic cross-sectional view illustrating a semiconductorlight-emitting device according to a first embodiment.

FIGS. 2A and 2B are schematic plane views illustrating shapes and layoutof elements arranged on a second principal surface side of thesemiconductor light-emitting device according to the first embodiment.

FIGS. 3A to 30 are schematic cross-sectional views illustrating amanufacturing method of the semiconductor light-emitting deviceaccording to the first embodiment.

FIGS. 4A to 4C are schematic cross-sectional views illustrating themanufacturing method of the semiconductor light-emitting deviceaccording to the first embodiment.

FIGS. 5A and 5B are schematic cross-sectional views illustrating themanufacturing method of the semiconductor light-emitting deviceaccording to the first embodiment.

FIGS. 6A to 6C are schematic cross-sectional views illustrating themanufacturing method of the semiconductor light-emitting deviceaccording to the first embodiment.

FIGS. 7A to 7D, 8A to 8D, 9A to 90, and 10A to 10B are schematic planeviews illustrating different examples of the shapes and layout of theelements arranged on the second principal surface of the semiconductorlight-emitting device according to the first embodiment.

FIG. 11 is a graph illustrating a relationship between a current densityand an output power of light according to the first embodiment.

FIG. 12 is a graph illustrating the relationship between the currentdensity and the output power of light according to the first embodiment.

FIGS. 13A and 13B are schematic plane views illustrating shapes andlayout of elements arranged on a second principal surface of asemiconductor light-emitting device according to a second embodiment.

FIG. 14 is a schematic plane view illustrating shapes and layout ofelements arranged on a second principal surface of a semiconductorlight-emitting device according to a third embodiment.

DETAILED DESCRIPTION

The purpose of embodiments of the present disclosure is to provide asemiconductor light-emitting device with higher luminance.

In general, according to one embodiment, a semiconductor light-emittingdevice has layers which include: a semiconductor layer having a firstprincipal surface, a second principal surface formed on a side oppositeto the first principal surface, and a light-emitting layer; ap-electrode arranged on the second principal surface in a region of thelight-emitting layer to surround an n-electrode arranged on the secondprincipal surface; and an insulating layer arranged on side surfaces ofthe semiconductor layer and on the second principal surface of thesemiconductor layer to surround the p-electrode and the n-electrode. Ap-metal pillar creates an electrical connection for the p-electrode, andan n-metal pillar creates an electrical connection for the n-electrode.A resin layer surrounds the end portions of the u--and the n-metalpillars, and also covers the side surfaces of the semiconductor layer,the second principal surface, the p-electrode, the n-electrode, theinsulating layer, the p-metal pillar and the n-metal pillar.

Embodiments will be explained with reference to figures, which allreference the same reference numbers throughout the following figures.In the figures illustrating the steps of operation, a portion of thewafer state is shown.

Example 1

FIG. 1 is a schematic cross-sectional view illustrating a semiconductorlight-emitting device 100 according to a first embodiment of the presentdisclosure. FIG. 2A is a schematic plane view illustrating an example ofshapes and layout of a p-electrode (first electrode) 16 and ann-electrode (second electrode) in the semiconductor light-emittingdevice 100 of the first embodiment. FIG. 2B is a schematic plane viewillustrating an example of the shapes and layout of a p-wiring layer 21,an n-wiring layer 22, a p-metal pillar 23, and an n-metal pillar 24 inthe semiconductor light-emitting device 100 of the first embodiment.

The semiconductor light-emitting device 100 of the first embodiment hasa semiconductor layer 15. The semiconductor layer 15 has a firstprincipal surface 15 a and a second principal surface 15 b formed on theside opposite to the first principal surface. On the side of the secondprincipal surface 15 b, electrodes, a wiring layer, metal pillars, and aresin layer are formed. The light is primarily output from the firstprincipal surface 15 a.

The semiconductor layer 15 has a first semiconductor layer 11, alight-emitting layer (active layer) 12, and a second semiconductor layer13. The first semiconductor layer 11 is an n-GaN layer that is a currentpath in a lateral direction. However, an electroconductive type of thefirst semiconductor layer 11 may be an n-type or a p-type. Thelight-emitting layer 12 is arranged to be sandwiched between the firstsemiconductor layer 11 and the second semiconductor layer 13, which is ap-GaN layer. However, the electroconductive type of the firstsemiconductor layer 11 may be a p-type or an n-type.

The side of the second principal surface 15 b of the semiconductor layer15 is embossed. The region protruding to the side opposite of the firstprincipal surface 15 a contains the light-emitting layer 12. A recessionregion dipping to the side of the first principal surface 15 a withrespect to the protrusion region does not contain the light-emittinglayer 12 and the second semiconductor layer 13.

A p-electrode 16 is a first electrode on the second semiconductor layer13 in the protrusion region (i.e., the p-electrode 16 is on thelight-emitting region having the light-emitting layer 12). Ann-electrode 17 is a second electrode on the first semiconductor layer 11of the recession region.

While the p-electrode 16 and the n-electrode 17 occupy almost theentirety of the second principal surface, an area of the p-electrode 16is larger than that of the n-electrode 17. The preferred design involvesthe area of the n-electrode 17 be 25% or less than the area of thep-electrode 16. By this configuration, the area of the light-emittingregion of the p-electrode 16 is larger than the area of thenon-light-emitting region of n-electrode 17, which allows for thepossibility of increasing the luminance.

The p-electrode 16 and the n-electrode 17 may be made of copper (Cu) ,silver (Ag) , or any metal associated with high electroconductivity.However, because the light emitted from the light-emitting layer 12 alsoreflects on the p-electrode 16 and the n-electrode 17, it is alsopreferred that these electrodes are made of a material associated withhigh reflectivity. With this composition, the efficiency of light outputfrom the first principal surface 15 a can be increased, therebyincreasing the luminance.

As shown in FIG. 2A, the n-electrode 17 is surrounded by the p-electrode16, and it has a first portion (pad portion) 17 a and a second portion(branch portion) 17 b.

The first portion 17 a is a region connected to a second opening 18 bwhere an n-wiring layer 22 shown in FIG. 1 is formed. In thisembodiment, the first portion 17 a is in quadrangle shape; however, theshape of the first portion is not limited to the quadrangle shape. Anyappropriate shape may be adopted.

The second portion 17 b is a region continuous to the first portion 17a. In this embodiment, it is rectangular, and the layout of then-electrode 17 is such that the longitudinal side of the rectangularshape is set along the longitudinal direction of the semiconductorlight-emitting device 100 in rectangular shape. Although thesemiconductor light-emitting device 100 is rectangular shape in thisembodiment, a scheme in which the semiconductor light-emitting devicehas a square shape may also be used.

A mean value of a length E1 (Eavg) of the second portion 17 b in thelateral direction (i.e., a width of the second portion 17 b) isrepresented by the following formula (1), where S represents an area ofthe second portion 17 b, E2 represents a length from the edge connectedwith the first portion 17 a to the end portion of the side opposite tothe first portion 17 a, and P represents a length of one edge of thefirst portion 17 a (or a diameter when the shape is a curved surface).

Eavg=S/E2≧0.3*P   (1)

On the other hand, a maximum length (Emax) of the length E1 of thesecond portion 17 b in the lateral direction is represented by thefollowing formula (2).

Emax≧0.6*P   (2)

Consequently, as the second portion 17 b is formed so that the averagelength Eavg of the second portion 17 b in the lateral direction is 30%or more of the length of an edge or the diameter of the first portion 17a, it is possible to diffuse the current density distribution on theperiphery of the first portion 17 a to the second portion 17 b. Thisconfiguration also can decrease heat generation. As a result, a highercurrent flow can be achieved, and emit light with a high luminance canbe emitted.

In addition, the second portion 17 b is formed so that its maximumlength Emax in the lateral direction is 60% or more the length of anedge or the diameter of the first portion 17 a. This configurationallows for the possibility of diffusing the density distribution of thefirst portion 17 a to the second portion 17 b, and it is possible todecrease heat generation. As a result, it is possible to have highercurrent flow, and it is thus possible to emit light at a higherluminance.

FIG. 11 is a diagram illustrating the results obtained in the simulationof a relationship between a current density and an output power of lightwhen the average length Eavg of the second portion 17 b in the lateraldirection is 20%, 30%, and 40% the length of an edge or the diameter ofthe first portion 17 a, respectively.

When the average length Eavg of the second portion 17 b in the lateraldirection is 20% the length of an edge or the diameter of the firstportion 17 a, the output power of light is lower than that achieved whenthe average length is 30% and 40% the length of an edge or the diameterof the first portion. Additionally, when the current density isincreased, the difference in the output power of light becomes greateri.e., the difference in the output power of light when the ratio is 20%,30% and 40%, respectively, becomes greater.

Here, it can be seen that by adopting 30% or larger for the averagelength, it is possible to realize an effect in suppressing increase inthe current density distribution on the periphery of the first portion17 a of the n-electrode 17 can be suppressed. As a result, the currentdensity distribution to the second portion 17 b can be diffused, therebydecreasing heat generation. As a result, the loaded current can beincreased to obtain a higher output power of light. That is, by adoptingthe average length to be 30% or greater, it is possible to emit thelight at a high luminance.

FIG. 12 is a diagram illustrating the results obtained in the simulationof the relationship between the current density and the output power oflight when the maximum length Emax of the second portion 17 b in thelateral direction is 40%, 60%, 80%, and 100% the length of an edge orthe diameter of the first portion 17 a, respectively.

When the second portion 17 b is formed so that its maximum length Emaxof the second portion 17 b in the lateral direction is 40% the length ofan edge or the diameter of the first portion 17 a, it can be seen thatthe output power of light is lower than that achieved when the ratio is60%, 80%, and 100%. Additionally, as the current density increases, thedifference in the output power of light between that with ratio of 40%and those with ratio of 60%, 80%, and 100% becomes greater.

When the ratio is 60%, 80%, or 100%, the difference in output power oflight is not so great. Consequently, one can say that by selecting theratio at 60% or larger, the current density distribution on theperiphery of the first portion 17 a of the n-electrode 17 can besuppressed. In addition, the current density distribution to the secondportion 17 b can be diffused, which reduces heat generation. This allowsfor more current to be loaded, a higher output power of light to beachieved, and light to be emitted with a higher luminance.

An insulating layer 14 is arranged between the n-electrode 17 and thep-electrode 16. A step is formed between the light-emitting region ofthe p-electrode 16 and the non-light-emitting region of the n-electrode17. This step is covered by the insulating layer 14.

The insulating layer 14 is applied on the side surface of thesemiconductor layer 15 and on the second principal surface to surroundthe p-electrode 16 and n-electrode 17. While the insulating layer 14 maybe made of a silicon oxide. However, its material is not limited to thesilicon oxide. It can also be made of other materials with insulatingproperties may also be used.

A first resin layer 18 is arranged to cover a portion of the insulatinglayer 14, the p-electrode 16, and the n-electrode 17. On the first resinlayer 18, a first openings 18 a are formed to generate electricconnection between the p-electrode 16 and p-wiring layer 21. Accordingto the present embodiment, plural first openings 18 a are formed;however, the process can progress if at least one first opening isformed. However, the heat quantity generated by the p-electrode 16 onthe light-emitting region having the light-emitting layer 12 is greaterthan that generated by the n-electrode 17 on the non-light-emittingregion that does not contain the light-emitting layer 12. According tothe present embodiment, plural first openings 18 a are formed toguarantee a heat dissipation path from the p-electrode 16 to thep-wiring layer 21. As a result, the heat dissipation property isexcellent, and the reliability and longevity can be improved.

On the first resin layer 18, the second opening 18 b for connecting then-electrode 17 with the n-wiring layer 22 with each other is formed. Inthis embodiment, a single second opening is formed, but plural openingsmay also be formed. However, as the heat quantity generated by then-electrode 17 is less than that generated by the p-electrode 16, onesecond opening is sufficient.

Consequently, the area for connecting between the p-electrode 16 and thep-wiring layer 21 via the first openings 18 a may be arranged to belarger than the area for connecting the n-electrode 17 with the n-wiringlayer 22 with each other via the second opening 18 b.

The light-emitting region provided with the p-electrode 16 protrudesfrom the portion of the n-electrode 17. Consequently, the space betweenthe p-electrode 16 and the p-wiring layer 21 is less than the spacebetween the n-electrode 17 and the n-wiring layer 22. In other words, adepth of the first openings 18 a (going from the outer surface 18 c ofthe first resin layer 18 to the p-electrode 16) is shallower than adepth of the second opening 18 b (going from the outer surface 18 c ofthe first resin layer 18 to the n-electrode 17). Consequently, the heatdissipation path is shorter and the heat dissipation efficiency ishigher on the p-via the first openings 18 a than the heat dissipationpath and heat dissipation efficiency on the n-type via the secondopening 18 b.

This allows for the material of the first resin layer 18 to be polyimideor similar resin with excellent patterning property for fine openings.In addition, any insulating material, such as silicon oxide, may beused.

The p-wiring layer 21 are formed on the first resin layer 18 as thefirst wiring layer and the n-wiring layer 22 are formed on the firstresin layer 18 as the second wiring layer, i.e., on the outer surface 18c on the side opposite to the side where the semiconductor layer 15 isarranged.

The p-wiring layer 21 is in the first openings 18 a formed on the firstresin layer 18 to reach and be electrically connected to the p-electrode16, and it is electrically connected to the p-electrode 16. On the otherhand, the n-wiring layer 22 is in the second opening 18 b formed on thefirst resin layer 18 to reach the n-electrode 17, and it is electricallyconnected to the n-electrode 17.

As a first metal pillar, the p-metal pillar 23 is arranged on thep-wiring layer 21. As a second metal pillar, the n-metal pillar 24 isarranged on the n-wiring layer 22. That is, the first semiconductorlayer 11 is in a state where it is electrically connected to the n-metalpillar 24 via the n-electrode 17 and the n-wiring layer 22. Then, thesecond semiconductor layer 13 is in a state where it is electricallyconnected to the p-metal pillar 23 via the p-electrode 16 and thep-wiring layer 21.

The p-metal pillar 23 and the n-metal pillar 24 have their end portionsprocessed to have a surface treatment film for preventing the formationof rust or the like (such as Ni, Au, or other electroless plating film,precoated solder, or the like). For example, the following scheme may beadopted: via a ball- or bump-shaped external terminal made of solder orother metal material, jointing is carried out to the wiring formed onthe assembly substrate or wiring plate. As a result, electric power canbe fed to the semiconductor light-emitting device.

The thicknesses of the p-metal pillar 23 and the n-metal pillar 24(i.e., the thicknesses from the upper side of the p-wiring layer 21 andthe n-wiring layer 22 to the end portion of the p-metal pillar 23 andn-metal pillar 24, respectively) are thicker than the thicknesses of thefollowing: the laminate containing the semiconductor layer 15; then-electrode 17; the p-electrode 16; the insulating layers 14 and 18; then-wiring layer 22; and the p-wiring layer 21 (i.e., the thickness fromthe surfaces of the p-wiring layer 21 and the n-wiring layer 22 incontact with the p-metal pillar 23 and the n-metal pillar 24 to thefirst principal surface of the semiconductor layer 15).

With the relationship of thicknesses, even when the semiconductor layer15 is thin, it is still possible to guarantee the mechanical strength byincreasing the thicknesses of the p-metal pillar 23, the n-metal pillar24, and the second resin layer 25. Additionally, when the substrate isassembled, the stress applied via the external terminals on thesemiconductor layer 15 can be relaxed, as the stress is absorbed by then-metal pillar 24 and the p-metal pillar 23.

According to the present embodiment, the thicknesses of the p-metalpillar 23 and the n-metal pillar 24 are selected to be thicker than thethicknesses of the following: the laminate containing the semiconductorlayer 15; the n-electrode 17; the p-electrode 16; the insulating layers14 and 18; the n-wiring layer 22; and the p-wiring layer 21. However,the present disclosure is not limited to this scheme; it may also bedesigned with thinner components.

The area of contact between the n-wiring layer 22 and the n-metal pillar24 is designed to he greater than the area of contact between then-wiring layer 22 and the n-electrode 17. As a result, while a higheroutput power of light is emitted by a larger light emitting layer 12, itis possible to form the electrode larger for lead-out via the n-wiringlayer 22 from the n-electrode 17 arranged with a small area for theportion of the semiconductor layer 15 that does not contain thelight-emitting layer 12. Consequently, the semiconductor light-emittingdevice 100 can be easily assembled, and it is possible to dissipate theheat generated by the semiconductor layer 15 with a high efficiency.

The area of the contact between the p-wiring layer 21 and the p-metalpillar 23 is designed to be larger than the area of contact between thep-wiring layer 21 and the p-electrode 16. However, the presentdisclosure is not limited to this scheme. One may also adopt as a schemein which the area of the contact between the p-wiring layer 21 and thep-metal pillar 23 is smaller than the area of the contact between thep-wiring layer 21 and the p-electrode 16.

The materials for making the p-wiring layer 21, the n-wiring layer 22,the p-metal pillar 23, and the n-metal pillar 24 include copper, gold,nickel, silver, etc. Among them, copper is preferred as it has highresistance to migration and excellent adherence with the insulatingmaterial.

The second resin layer 25 is arranged on the first resin layer 18 andsurrounds the end portions of the p-metal pillar 23 and the n-metalpillar 24. It is arranged to cover the p-wiring layer 21 and then-wiring layer 22. That is, the end portions (the upper surface as shownin FIG. 1) of the p-metal pillar 23 and the n-metal pillar 24 areexposed from the second resin layer 25.

The second resin layer 25 can be formed thick and at a low cost. Here,the preferred design requires the second resin layer to be made of aresin appropriate for reinforcing the n-metal pillar 24 and the p-metalpillar 23. For example, epoxy resin, silicone resin, fluororesin, etc.may be adopted. However, the second resin layer 25 may be made of thesame material as the first resin layer 18.

A phosphor layer 28 is on the first principal surface 15 a of thesemiconductor layer 15. The phosphor layer 28 can absorb the light fromthe light-emitting layer 12 and emits the light with convertedwavelength. Consequently, it is possible to emit a mixed light,including the light from the light-emitting layer 12 and thewavelength-converted light from the phosphor layer 28. For example, whenthe light-emitting layer 12 is made of a nitride-type material, it ispossible to obtain white light or incandescent-light-bulb color lightemitted due to the mixture of the blue light from the light-emittinglayer 12 and the wavelength-converted light in yellow color obtained bythe phosphor layer 28. In addition to yellow phosphor, the phosphorlayer 28 may have a constitution containing plural types of phosphors(such as a red phosphor and green phosphor).

Examples of the phosphor layers that can be used as the phosphor layer28 include the following a red phosphor layer, a yellow phosphor layer,a green phosphor layer, and a blue phosphor layer.

Examples of the red phosphor layers include those containing thenitride-type phosphor (CaAlSiN3:Eu) and sialon-type phosphor (siliconaluminum oxynitride).

With the sialon phosphor (silicon aluminum oxynitride) is utilized, inparticular, the following type is preferred:

(M_(1-x), R_(x)) a ₁AlSib ₁Oc ₁Nd ₁

(where, M represents at least one type of metal element excluding Si andAl, or preferably at least one of Ca and Sr; R represents thelight-emitting center element, or preferably Eu; x, a₁, b₁, c₁, d₁ meetthe following relationship: 0<x<1; 0.6<a₁≦0.95; 2<b₁≦3.9; 0.25<c₁ ≦0.45;4<d ₁≧5.7).

By using the sialon-type phosphor (silicon aluminum oxynitride)represented by the formula (1), improvements to the temperaturecharacteristics of the wavelength conversion efficiency can be achieved,and it is possible to further increase the efficiency in the highcurrent density region.

For example, the yellow phosphor layer may contain the silicate-typephosphor (Sr, Ca, Ba) 2SiO₄:Eu.

For example, the green phosohor layer may contain the halophosphate-typephosphor (Ba, Ca, Mg)₁₀(PO₄)₆ C₁₂:Eu or sialon-type phosphor (siliconaluminum oxynitride).

With the sialon-type phosphor (silicon aluminum oxynitride), inparticular, the following type is preferred:

(M_(1-x), R_(x)) a ₂AlSib ₂Oc ₂Nd ₂

(where, M represents at least one type of metal element excluding Si andAl, or preferably at least one of Ca and Sr;

R represents the light -emitting center element, or preferably Eu; x,a2, b2, c2, d2 meet the following relationship: 0<x≦1; 0.93<a₂≦1.3;4.0<b₂≦5.8; 0.6<c₂≦1; 6<d₂≦11)

By using the sialon-type phosphor (silicon aluminum oxynitride)represented by the formula (2), it is possible to improve thetemperature characteristics of the wavelength conversion efficiency, andfurther increases to the efficiency in the high current density regioncan be achieved.

For example, the blue phosphor layer may contain the oxide-typephosphor: BaMgAl₁₀O₁₇:Eu.

The light, emitted from the light-emitting layer 12 mainly goes through.the first semiconductor layer 11, the first principal surface 15 a, andthe phosphor layer 28 before being emitted outwards.

Because electrodes are on the first principal surface 15 a as thelight-emitting surface, light emission is not hampered by theelectrodes, and a high luminance can be obtained. The p-electrode 16 andthe n-electrode 17 are on the first principal surface on the sideopposite to the first principal surface 15 a. Because the p-electrode 16and the n-electrode 17 are not arranged on the light-emitting surface,one has a high freedom in selecting their shapes and layout.

In the embodiment, the electrodes are designed to have a higherlight-emitting efficiency and a greater luminance. As shown in FIG. 2A,for the n-electrode 17, the first portion 17 a and the second portion 17b are surrounded by the p-electrode 16. Then, the second portion 17 blies along the longitudinal direction of the p-electrode 16 (thelongitudinal direction of the semiconductor light-emitting device 100),and the average length Eavg of the second portion 17 b in the lateraldirection is formed to be 30% or greater than the length of an edge orthe diameter of the first portion 17 a. As a result, it is possible todiffuse the current density distribution on the periphery of the firstportion 17 a to the second portion 17 b. This layout allows for thediffusion the current density distribution on the periphery of the firstportion 17 a of the n-electrode 17 to the second portion 17 b. As aresult, it is possible to realize a high-efficiency semiconductorlight-emitting device with the current density decreasing in the facedirection of the light-emitting layer 12.

In addition, the maximum length Emax of the second portion 17 b in thelateral direction of the second portion 17 b is formed to be 60% orgreater than the length of an edge or the diameter of the first portion17 a; this allows for further diffusion of the density distribution onthe periphery of the first portion 17 a to the second portion 17 b,which can decrease heat generation.

In the following, a manufacturing method of the semiconductorlight-emitting device related to the embodiment will be explained withreference to FIGS. 3A to 6C.

First of all, as shown in FIG. 3A, the first semiconductor layer 11 isformed on a principal surface of a substrate 10 (e.g., of a memory cellarray), and the second semiconductor layer 13 and the light-emittinglayer 12 are formed on the first semiconductor layer. When thesesemiconductor layers that make up the semiconductor layer 15 are made ofa nitride-type semiconductor, for example, they may be formed by crystalgrowth on a sapphire substrate or a silicon substrate.

Next, FIG. 3B depicts how separating trenches 9 are formed through thesemiconductor layer 15 to reach the substrate 10 (e.g., via the RIE(reactive ion etching) method using a resist not shown in the figure).The separating trenches 9 are formed in a lattice configuration on thesubstrate 10 while the substrate 10 is in a wafer state, to separate thesemiconductor layer 15 into plural portions.

Then, with the RIE method using a resist not shown in the figure, aportion of the second semiconductor layer 13 and the light-emittinglayer 12 is removed so that a portion of the first semiconductor layer11 is exposed. As a result, on the side of the second principal surface15 b of the semiconductor layer 15, a light-emitting region located inan upper section as viewed from the substrate 10 and anon-light-emitting region located in a lower section nearer thesubstrate 10 than the light-emitting region are formed. Thelight-emitting region contains the light-emitting layer 12, and thenon-light-emitting region does not contain the light-emitting layer 12.

FIG. 30 shows the next step, namely how the principal surface of thesubstrate 10, the side surfaces of the semiconductor layer 15, and thesecond principal surface 15 b of the semiconductor layer 15 are coveredby the insulating layer 14. This insulating layer 14 is then selectivelyremoved to allow the p-electrode 16 to be formed on the surface of thelight-emitting region (i.e., the surface of the second semiconductorlayer 13) and the n-electrode 17 to be formed on the surface of thenon-light-emitting region (i.e., the surface of the first semiconductorlayer 11). Either the p-electrode 16 or the n-electrode 17 may be formedfirst; alternately, the p-electrode 16 and the n-electrode 17 can beformed using the same material at the same time.

The next step, as shown in FIG. 4A, involves covering the entirety ofthe portion exposed on the substrate 10 by the first resin layer 18. Thefirst resin layer 18 al so fills in the separating trenches 9.

Then, as shown in FIG. 4B, the pattern of the first resin layer 18 isformed, e.g., by wet etching, to form the first openings 18 a and thesecond opening 18 b selectively in the first resin layer 18. Pluralfirst openings 18 a are formed to reach the p-electrode 16. The secondopening 18 b is formed to reach the n-electrode 17. The depth from anouter surface 18 c of the first resin layer 18 of the second opening 18b is greater than that of the first openings 18 a.

In the next step of the manufacturing process, a seed metal 19(indicated by broken line in FIG. 4B) is formed continuously on theouter surface 18 c of the first resin layer 18 and the inner surfaces ofthe first openings 18 a and the second opening 18 b. In addition, aresist is formed selectively on the seed metal 19.

Then, Cu electroplating is carried out with the seed metal 19 as thecurrent path. As a result, as shown in FIG. 4C, on the outer surface 18c of the first resin layer 18, the p-wiring layer 21 and the n-wiringlayer 22 are formed selectively. The p-wiring layer 21 is formed insidethe first openings 18 a, and it is connected to the p-electrode 16. Then-wiring layer 22 is formed in the second opening 18 b, and it isconnected to the n-electrode 17. The p-wiring layer 21 and the n-wiringlayer 22 are formed simultaneously using the Cu electroplating method.However, it is not a necessity to form the p-wiring layer 21 and then-wiring layer 22 at the same time; either of them may be formed first.

At the n-wiring layer 22, the surface on the side opposite to then-electrode 17 is larger than that of the surface contacting then-electrode 17, and it is formed in a pad shape on the outer surface 18c of the first resin layer 18. Similarly, at the p-wiring layer 21, thesurface on the side opposite to the p-electrode 16 is larger than thesurface contacting the p-electrode 16, and it is formed in a pad shapeon the outer surface 18 c of the first resin layer 18.

In the next step depicted in FIG. 5A, another resist (not shown in thefigure) for constructing metal pillars is selectively formed on thefirst resin layer 18, and, by Cu electroplating with the seed metal 19as the current path, the p-metal pillar 23 is formed on the p-wiringlayer 21, and the n-metal pillar 24 is formed on the n-wiring layer 22.The p-metal pillar 23 and the n-metal pillar 24 are simultaneouslyformed using the Cu electroplating method. However, it is not anecessity to form the p-metal pillar 23 and the n-metal pillar 24simultaneously. Either of them may be formed first.

After the plating, the p-wiring layer 21, the n-wiring layer 22, thep-metal pillar 23, and the n-metal pillar 24 are used as a mask to carryout wet etching of the seed metal 19 exposed on the outer surface 18 cof the first resin layer 18 (as shown in FIG. 5B). As a result, theelectrical connection between the p-wiring layer 21 and the n-wiringlayer 22 via the seed metal 19 is cut off.

Next, the second resin layer 25 is formed on the first resin layer 18.The second resin layer 25 covers the p-wiring layer 21, the n-wiringlayer 22, the p-metal pillar 23, and the n-metal pillar 24. The secondresin layer 25 fills the area between the side surfaces of the p-metalpillar 23 and the side surfaces of the n-metal pillar 24 and the areabetween the p-wiring layer 21 and the n-wiring layer 22.

Once this has been completed, the second resin layer 25 is ground, sothat the upper surfaces of the p-metal pillar 23 and the n-metal pillar24 (i.e., the surfaces on the side opposite to the first resin layer 18)are exposed through the second resin layer 25. Alternatively, thefollowing scheme may also be adopted: after formation of the phosphorlayer 28 (to be explained later), the second resin layer 25 is ground,and the upper surfaces of the p-metal pillar 23 and the n-metal pillar24 are exposed.

Subsequently, as shown in FIG. 6A, the substrate 10 is removed by anappropriate method. For example, the substrate 10 may be removed usingthe laser liftoff method or by etching. More specifically, when thesubstrate 10 is light-transmissive, a laser beam is irradiated from theinner surface side of the substrate 10 towards the first semiconductorlayer II. As the laser beam reaches the interface between the substrate10 and the first semiconductor layer 11, the first semiconductor layer11 near the interface absorbs the laser energy and is decomposed. Whenthe first semiconductor layer 11 is made of metal nitride (e.g., GaN),it is decomposed to gallium (Ga) and nitrogen (N) gas. With thisdecomposition reaction, a fine spacing is created between the substrate10 and the first semiconductor layer 11, and the substrate 10 and thefirst semiconductor layer 11 are caused to separate from each other.

Irradiation of the laser beam is carried out for the entirety of thewafer as it is executed in plural rounds for each preset region, so thatsubstrate 10 can be removed. By removing the substrate 10 from the firstprincipal surface 15 a, it is possible to increase the light outputefficiency.

After removal of the substrate 10, the first principal surface 15 a iscleaned, and the first principal surface 15 a is then roughened toincrease the light output efficiency, as needed.

As shown in FIG. 6B, the next step involves the formation of thephosphor layer 28 on the first principal surface 15 a of thesemiconductor layer 15. In one example, after a liquid transparent resinin which phosphor particles are dispersed (the resin is transparent withrespect to the light emitted from the light-emitting layer 12 and thephosphor particles), is coated using the spin coating method, thermalcuring is carried out to form the phosphor layer 28.

After the formation of the phosphor layer 28, dicing is carried outusing a dicing blade D at the position of the separating trenches 9, asshown in FIG. 6C, to form individual pieces. The semiconductor layer 15is absent in the separating trenches 9; therefore, it is easy to carryout dicing to improve the productivity while avoiding possible damage tothe semiconductor layer 15 during dicing. Additionally, after formationof the individual pieces, the structure can be protected as the sidesurface of the semiconductor layer 15 is covered by the first resinlayer 18.

The semiconductor light-emitting device formed as individual pieces mayhave a single-chip structure containing one semiconductor layer (chip)15 or may have a multi-chip structure containing plural semiconductorlayers (chips) 15.

The various steps of operation carried out before dicing are performeden bloc in the wafer state so that there is no need to carry outelectrode re-wiring and packaging for the individual semiconductorlight-emitting devices after dicing. As a result, it is possible tosignificantly reduce the manufacturing costs. That is, for theindividual pieces, electrode re-wiring and packaging have been finished.Also, it is possible perform checkup at the wafer level. As a result,productivity can be increased so that it is easy to cut manufacturingcosts.

The planar shape of the chip is not limited to the rectangular shape. Itmay also be a square shape. In addition, the shapes of the p-metalpillar 23 and n-metal pillar 24 are not limited to cylinders, and may besquare pillars, columns with an elliptic cross-section, etc.

FIGS. 7A to 9C, FIGS. 10A, and 10B are diagrams illustrating otherexamples of the layout of the p-electrode 16 and the n-electrode 17.Here, the n-electrode 17 is formed to at least satisfy the relationshipof Eqn. (1)

As shown in FIG. 7A, the second portion 17 b of the n-electrode 17 isformed to extend along the same direction as the longitudinal directionof the p-electrode 16. Also, the second portion 17 b is formed asfollows: from the side of the first portion 17 a of the n-electrode 17towards the end portion of the side opposite to the first portion 17 a;and with the length E1 in the lateral edge direction of the secondportion 17 b being narrower gradually.

As shown in FIG. 7B, the second portion 17 b of the n-electrode 17 isformed to extend along the longitudinal direction of the p-electrode 16.A step D1 is formed in the second portion 17 b at an end portionopposite to the first Portion 17 a. The length E1 in the lateraldirection of the second portion 17 b from the first portion 17 a towardsthe step D1 becomes gradually narrower. Next, at the step D1, the lengthE1 in the lateral direction of the second portion 17 b is nearlyuniform.

As shown in FIG. 7C, in addition to the structure shown in FIG. 7B, stepD2 is formed on the second portion 17 b. In this structure, the lengthE1 in the lateral direction of the second-portion 17 b from the firstportion 17 a of the n-electrode 17 towards the step D1 becomes graduallynarrower. From there, the second portion is formed with a nearlyconstant width until a corner K1; and the length E1 in the lateraldirection of the second portion 17 b becomes gradually narrower from thecorner K1 to a step D2, which is at end portion opposite to the firstportion 17 a; and, at the step D2, the length E1 in the lateraldirection of the second portion 17 b is nearly uniform.

As shown in FIG. 7D, the second portion 17 b of the n-electrode 17 isformed from the side of the first portion 17 a towards the end portionat the side opposite to the first portion 17 a so that the length E1 inthe lateral direction of the second portion 17 b becomes graduallynarrower, in such a manner that the longitudinal edges of the secondportion 17 b each depict an arc with an inward curvature.

As shown in FIG. 8A, from the first portion 17 a of the n-electrode 17to the end portion on the side opposite to the first portion 17 a, thep-electrode 16 protrudes with respect to the lateral direction of thesecond portion 17 b. That is, it is formed so that the length E1 in thelateral direction of the second portion 17 b from the first portion 17 ato the corner K1 has a nearly constant width, and the length E1 in thelateral direction of the second portion 17 b becomes gradually widerfrom the corner K1 to the corner K2, and becomes gradually narrower fromthe corner K2 towards the step D1. Additionally, the portion from thestep D1 to the end portion on the side opposite to the first portion 17a is formed so that the length E1 in the lateral direction of the secondportion 17 b has a constant width.

As shown in FIG. 8B, the first portion 17 a of the n-electrode 17 isformed as a round shape with curved edges. FIGS. 80 to 90 depict then-electrode 17 having a round shape with curved edges in place of thequadrangle shape shown in FIGS. 7A to 8A, respectively.

As shown in FIGS. 10A and 10B, plural second portions 17 b may be formedto be in contact with the first portion 17 a of the n-electrode 17. FIG.10A depicts the second portion 17 b having a cross shape, and FIG. 10Bdepicts the second portion 17 b having an L shape.

Although not shown in the figure, the shape of the first portion 17 a isnot limited to the quadrangle shape and the round shape; it may haveother shapes, such as polygonal shape, curved shape, and shape havingboth corners and curves.

In all of the examples shown in FIGS. 7A to 9C, FIGS. 10A and 10B, then-electrode 17 is surrounded by the p-electrode 16. As a result, it ispossible to diffuse the current density distribution so that it is easyto disperse the heat on the periphery of the n-electrode 17 generatedwhen the current flows. Additionally, it is possible to have a highcurrent flow, so that it is possible to obtain a semiconductorlight-emitting device with a higher efficiency.

Example 2

The following semiconductor light-emitting device according to a secondembodiment of the present disclosure will be explained with reference toFIGS. 13A and 13B. The second embodiment differs from the firstembodiment in that there are plural n-electrodes each having a firstportion and a second portion. The structure of each at thesen-electrodes may have the same configurations as described above.Consequently, in the following, the same features as in the firstembodiment will not be explained again, and only the differences will beexplained.

As shown in FIG. 13A, plural n-electrodes 30, 31 are formed andsurrounded by the p-electrode 16. While the plural n-electrodes 30, 31have the first portions 30 a, 31 a as the regions connected to then-wiring layer 22, regions 30 b, 31 b are formed continuous to the firstportions 30 a, 31 a. Next, an insulating layer 14 is formed between then-electrodes 30, 31 and the p-electrode 16 and to surround the peripheryof the p-electrode 16.

The shape of the first portions 30 a, 31 a is nearly quadrangle.However, the present disclosure is not limited to the quadrangle shape.Any appropriate shape may be used.

The second portions 30 b, 31 b are arranged in a nearly rectangularshape. As the layout of the p-electrode 16 is nearly rectangular, thelongitudinal edges of the second. Portions 30 b, 31 b extend along thelongitudinal direction of the p-electrode 16. In this embodiment thelayout has a nearly rectangular shape. However, for the square-shapedsemiconductor light-emitting device, the longitudinal edges of therectangular shape may extend laterally.

Also, the plural n-electrodes 30, 31 are arranged so that there arecentral axes that go through the first portions 30 a, 31 a and thesecond portions 30 b, 31 b of the n-electrodes 30, 31, respectively, andhave linear symmetry (i.e., the lateral direction of the n-electrode haslinear symmetry). The central axis is arranged parallel to thelongitudinal direction of the n-electrodes 30, 31.

The plural n-electrodes 30, 31 are formed appropriately to meet thefollowing formula (3), where Xa represents the distance between thesurface side on the side opposite to the surface side of the insulatinglayer 14 formed on the side of one side surface of the p-electrode 16 inthe longitudinal direction and the surface side opposite to the surfaceside of the insulating layer 14 formed on the side of the other sidesurface of the p-electrode 16 in the longitudinal direction; X1represents the distance between the surface side on the side opposite tothe surface side of the insulating layer 14 formed on the side of theside surface of the p-electrode 16 in the longitudinal direction and thecentral axis of the n-electrode 30; X2 represents the distance betweenthe central axis of the n-electrode 30 and the central axis of then-electrode 31; and X3 represents the distance between the surface sideon the side opposite to the surface side of the insulating layer 14formed on the side of the other side surface of the p-electrode 16 inthe longitudinal direction and the central axis of the n-electrode 31.

X2=X1+X3=0.5*Xa   (3)

With the this relationship met, it is possible to arranged pluraln-electrodes 30, 31 almost equidistantly, allowing for diffusion of thecurrent density on the periphery of the first portions 30 a, 31 a to thesecond portions 30 b, 31 b. Hence, heat generation can be decreased. Asa result, it is possible to have more current flow, and light can beemitted at higher luminance.

FIG. 13A the case of two n-electrodes arranged is presented. On theother hand, the case of three n-electrodes arranged will be explainedwith reference to FIG. 13B.

The n-electrode 32 is arranged between the n-electrodes 30, 31 and isset to be surrounded by the p-electrode 16 via the insulating layer 14.In addition, the n-electrode 32 is parallel to the central axis of then-electrodes 30, 31.

In this configuration, the n-electrodes 30, 31, 32 are formed so thatthe following formula (4) is met, where Ye represents the distancebetween the surface side on the side opposite to the surface side of theinsulating layer 14 formed on the side of one side surface of thep-electrode 16 in the longitudinal direction and the surface sideopposite to the surface side of the insulating layer 14 formed on theside of the other side surface of the p-electrode 16 in the longitudinaldirection; Y1 represents the distance between the surface side on theside opposite to the surface side of the insulating layer 14 formed onthe side of one side surface of the p-electrode 16 in the longitudinaldirection and the central axis of the n-electrode 30; Y2 represents thedistance between the central axis of the n-electrode 30 and the centralaxis of the n-electrode 32; Y3 represents the distance between thecentral axis of the n-electrode 32 and the central axis of then-electrode 31; and Y4 represents the distance between the surface sideon the side opposite to the surface side of the insulating layer 14formed on the side of the other side surface of the p-electrode 16 inthe longitudinal direction and the central axis of the n-electrode 31.

Y2=Y3=Y1+Y4=(⅓)*Ya   (4)

In this embodiment, the cases of two and three n-electrodes have beenexplained. However, because there may be more of them, and generalizedexplanation will be provided. In these cases, the configuration is suchthat the central axes of the adjacent n-electrodes are arrangedequidistantly. The n-electrode arranged on the side surface of thep-electrode 16 in the longitudinal direction should be arranged so thatthe distance between the side of the surface of the insulating layer 14formed on the side of the side surface of the p-electrode 16 in thelongitudinal direction and the central axis of the n-electrode is halfthe distance between the central axes of the adjacent n--electrodes.

By making arrangement with the relationship, it is possible to have theplural n-electrodes to be set almost equidistantly. Consequently, thecurrent density distribution of the first portion can be diffused to thesecond portion, so that it is possible to decrease heat generation. As aresult, it is possible to have higher current flow, and thus it ispossible to generate light at higher luminance.

Example 3

The following explains the semiconductor light-emitting device relatedto Embodiment 3 of the present disclosure with reference to FIG. 14. Thepresent embodiment differs from Embodiment 2 in that arrangement ofn-electrodes (each made of only the first portion of the n-electrode),while the remaining features of the constitution are the same.Consequently, only the features different from those of Embodiment 2will be explained in the following.

As shown in FIG. 14, in addition to the plural n-electrodes (firstn-electrodes) 30, 31, there are also n-electrodes (second n-electrodes)40, 41 made of only the first portions 40 a, 41 a. The n-electrodes 40,41 are formed on the side where the first portions 30 a, 31 a of then-electrodes 30, 31 are formed.

While the n-electrodes 40, 41 have nearly quadrangle shape, anyappropriate shape may be adopted.

In this embodiment, the n-electrodes 40, 41 are arranged so that thecenters of the n-electrodes 40, 41 are located on the central axes ofthe n-electrodes 30, 31, respectively. In this embodiment, theconfiguration is that the centers of the n-electrodes 40, 41 are locatedalong the central axes of the n-electrodes 30, 31, respectively.However, the present disclosure is not limited to the configuration. Anystructure may be adopted as long as the central axes are separated fromeach other by more than a the radius which is defined as the distancebetween the surface side on the side opposite to the surface side of theinsulating layer 14 formed on the side of the side surface of thep-electrode 16 in the longitudinal direction and the center of the firstportions 30 a, 31 a of the n-electrodes 30, 31 (e.g., X1 and X3). In thepreferred configuration, the n-electrodes 40, 41 will be symmetric withrespect to the central axis of the p-electrode 16 in the lateraldirection. In addition, they may be arranged on the side opposite to thesecond portions 30 b, 31 b.

Creating this relationship allows for the plural n-electrodes to be setalmost equidistantly. Consequently, the current density distribution ofthe first portion can be diffused to the second portion to decrease heatgeneration. As a result, higher current flow is possible, and light canbe generated at a higher luminance.

In this embodiment, plurality of the n-electrodes with the secondportion are arranged, and plurality of the n-electrodes each having onlythe first portion are arranged. However, other designs can also beadopted, such as a scheme in which the n-electrodes with the secondportion and the n-electrodes with the first portion are arranged one byone. Alternately, a scheme in which plurality are arranged for eitherthe n-electrodes with the second portion or the n-electrodes with thefirst portion may also be adopted.

While certain embodiments have been described, these embodiments havebeen presented by way of example only and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions, and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theinventions. The accompanying claims and their equivalents are intendedto cover such forms or modifications as would fall within the scope andspirit of the inventions.

What is claimed is:
 1. A semiconductor light-emitting device comprising:a semiconductor layer comprising a first principal surface, a secondprincipal surface formed on a side opposite to the first principalsurface, and a light-emitting layer; a p-electrode arranged on thesecond principal surface; an n-electrode arranged on the secondprincipal surface and surrounded by the p-electrode; and an insulatinglayer arranged on side surfaces of the semiconductor layer and on thesecond principal surface of the semiconductor layer to surround thep-electrode and the n-electrode.
 2. The semiconductor light-emittingdevice according to claim 1, wherein the n-electrode includes a firstportion electrically connected to an n-metal pillar and a second portionarranged continuously with the first portion to disperse current flowingthrough the n-electrode.
 3. The semiconductor light-emitting deviceaccording to claim 2, wherein a plurality of the n-electrodes arearranged on the second principal surface; and a distance from a centralaxis of an outermost n-electrode and a longitudinal edge of thep-electrode is one-half of a distance between central axes of adjacentn-electrodes.
 4. The semiconductor light-emitting device according toclaim 3, wherein the n-electrodes further include: a first n-electrodehaving a first portion electrically connected to the n-metal pillar anda second portion arranged continuous to the first portion; and a secondn-electrode, which is arranged separate from the first n-electrode andhas a portion electrically connected to the n-metal pillar,
 5. Thesemiconductor light-emitting device according to claim 4, wherein thesecond n-electrode is separated from the first n-electrode by a circlehaving a radius equal to a distance from a central axis of the secondn-electrode and a longitudinal edge of the p-electrode.
 6. Thesemiconductor light-emitting device according to claim 2, wherein thesecond portion has a shape with a longitudinal edge and a lateral edge,and an average length of the lateral edge is 30% or more than a lengthof one edge or a diameter of the first portion.
 7. The semiconductorlight-emitting device according to claim 6, wherein a maximum length ofthe lateral edge is 60% or more than the length of one edge or thediameter of the first portion.
 8. The semiconductor light-emittingdevice according to claim 1, wherein an area of the p-electrode islarger than that of the n-electrode.
 9. A method of forming asemiconductor light-emitting device, said method comprising: forming asemiconductor layer including a first principal surface, a secondprincipal surface on a side opposite to the first, principal surface,and a light-emitting layer; forming a p-electrode on the secondprincipal surface; forming an n-electrode on the second principalsurface to be surrounded by the p-electrode; forming an insulating layeron side surfaces of the semiconductor layer and on the second principalsurface of the semiconductor layer to surround the p-electrode and then-electrode.
 10. The method according to claim 9, wherein then-electrode includes a first portion electrically connected to ann-metal pillar and a second portion arranged continuously with the firstportion to disperse current flowing through the n-electrode.
 11. Themethod according to claim 10, wherein a plurality of the n-electrodesare formed on the second principal surface; and a distance from acentral axis of an outermost n-electrode and a longitudinal edge of theis-electrode is one-half of a distance between central axes of adjacentn-electrodes.
 12. The method according to claim 11, wherein then-electrodes further include: a first n-electrode having a first portionelectrically connected to the n-metal pillar and a second portionarranged continuous to the first portion; and a second n-electrode,which is arranged separate from the first n-electrode and has a portionelectrically connected to the n-metal pillar.
 13. The method accordingto claim 12, wherein the second n-electrode is separated from the firstn-electrode by a circle having a radius equal to a distance from acentral axis of the second n-electrode and a longitudinal edge of thep-electrode.
 14. The method according to claim 10, wherein the secondportion has a shape with a longitudinal edge and a lateral edge, and anaverage length of the lateral edge is 30% or more than a length of oneedge or a diameter of the first portion.
 15. The method according toclaim 14, wherein a maximum length of the lateral edge is 60% or morethan the length of one edge or the diameter of the first portion. 16.The method according to claim 9, wherein an area of the p-electrode islarger than that of the n-electrode.